Automatic Extraction Methodology for Accurate Measurements...

IEEE Transactions on Semiconductor Manufacturing 2008 / 11 Vol. 21; Iss. 4

Automatic Extraction Methodology for Accurate Measurements of Effective Channel Length on 65-nm MOSFET Technology and Below

Fleury, Dominique, Cros, Antoine, Romanjek, Krunoslav, Roy, David, Perrier, Franck, Dumont, Benjamin, Brut, Hugues, Ghibaudo, GÉrard
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Volume:
21
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2008.2004316
Date:
November, 2008
File:
PDF, 844 KB
english, 2008
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