[IEEE 2014 IEEE 11th International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur, Malaysia (2014.8.27-2014.8.29)] 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014) - Atomic force microscope base nanolithography for reproducible micro and nanofabrication
Dehzangi, Arash, Larki, Farhad, Majlis, Burhanuddin Y., Kazemi, Zainab, Ariannejad, MohammadMahdi, Abdullah, A Makarimi, Nasery, Mahmood Goodarz, Navasery, Manizheh, Saion, Elias B, Halimah, Mohamed KYear:
2014
Language:
english
DOI:
10.1109/smelec.2014.6920884
File:
PDF, 1.13 MB
english, 2014