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[Japan Soc. Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (11-13 July 2000)] Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) - Effects of H/sub 2/ addition in magnetized inductively coupled C/sub 2/F/sub 6/ plasma etching of silica aerogel film
Seok-Joo Wang,, Hyung-Ho Park,, Sang-Hoon Hyun,, Geun-Young Yeom,Year:
2000
Language:
english
DOI:
10.1109/imnc.2000.872712
File:
PDF, 191 KB
english, 2000