[IEEE 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics - Freiburg, Germany (2008.08.11-2008.08.14)] 2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics - A novel etching-oxidation fabrication method for 3D nano structures on silicon and its application to SOI symmetric waveguide and 3D taper spot size converter

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