[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Annealing effect on the stability of platinum thin films covered by SiO2 or SiNx layer
Li Xiao,, Zhan Zhao,, Lidong Du,, Shaohua Wu,, Qimin Liu,Year:
2013
Language:
english
DOI:
10.1109/nems.2013.6559749
File:
PDF, 820 KB
english, 2013