Silicon?germanium films for photomasking applications
Liu, Chi-Wing, Cairns, James A., Gibson, Roderick A. G., Hourd, Andrew C., Lawrenson, Brian, Leece, Charles F.Volume:
4
Year:
1994
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/jm9940400393
File:
PDF, 1.04 MB
english, 1994