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[IEEE 2011 IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kaohsiung, Taiwan (2011.02.20-2011.02.23)] 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Optimization of functional layers in piezoelectric thick film MEMS process
Lee, Dong-Yeon, Shim, Jaesool, Kim, Tae Song, Park, Jae HongYear:
2011
Language:
english
DOI:
10.1109/nems.2011.6017296
File:
PDF, 766 KB
english, 2011