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[IEEE IEEE SoutheastCon 2002 - Columbia, SC, USA (5-7 April 2002)] Proceedings IEEE SoutheastCon 2002 (Cat. No.02CH37283) - An automated defect detection system for silicon carbide wafers
Kubota, T., Talekar, P., Sudarshan, T.S., Xianyun Ma,, Parker, M., Yuefei Ma,Year:
2002
Language:
english
DOI:
10.1109/.2002.995555
File:
PDF, 670 KB
english, 2002