[IEEE 2002 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, USA (11-13 June 2002)] 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) - High soft-error tolerance body-tied SOI technology with partial trench isolation (PTI) for next generation devices
Hirano, Y., Iwamatsu, T., Shiga, K., Nii, K., Sonoda, K., Matsumoto, T., Maeda, S., Yamaguchi, Y., Ipposhi, T., Maegawa, S., Inoue, Y.Year:
2002
Language:
english
DOI:
10.1109/vlsit.2002.1015383
File:
PDF, 316 KB
english, 2002