[IEEE International Electron Devices Meeting. IEDM Technical Digest - Washington, DC, USA (7-10 Dec. 1997)] International Electron Devices Meeting. IEDM Technical Digest - A novel BST storage capacitor node technology using platinum electrodes for Gbit DRAMs
Khamankar, R.B., Kressley, M.A., Visokay, M.R., Moise, T., Xing, G., Nemoto, S., Okumo, Y., Fang, S.J., Wilson, A.M., Gaynor, J.F., Hurd, T.Q., Crenshaw, D.L., Summerfelt, S., Colombo, L.Year:
1997
Language:
english
DOI:
10.1109/iedm.1997.650372
File:
PDF, 494 KB
english, 1997