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[IEEE 1998 Semiconductor Manufacturing Technology Workshop - Hsinchu, Taiwan (16-17 June 1998)] 1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) - A conceptual framework for manufacturing service provisioning by virtual fabs
Yea-Huey Su,, Ruey-Shan Guo,, Shi-Chung Chang,Year:
1998
Language:
english
DOI:
10.1109/smtw.1998.722657
File:
PDF, 741 KB
english, 1998