Complex three-dimensional conformal surfaces formed by atomic layer deposition: computation and experimental verification
Brzezinski, Andrew, Chen, Ying-Chieh, Wiltzius, Pierre, Braun, Paul V.Volume:
19
Year:
2009
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/b914318a
File:
PDF, 1.36 MB
english, 2009