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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Pull-in time dynamics as a measure of absolute pressure
Gupta, R.K., Senturia, S.D.Year:
1997
Language:
english
DOI:
10.1109/memsys.1997.581830
File:
PDF, 484 KB
english, 1997