The Grand Pareto: A Methodology for Identifying and...

The Grand Pareto: A Methodology for Identifying and Quantifying Yield Detractors in Volume Semiconductor Manufacturing

Desineni, Rao, Berndlmaier, Zachary, Winslow, Jonathan, Blauberg, Alisa, Chu, Benjamin R.
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Volume:
20
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2007.896641
Date:
May, 2007
File:
PDF, 1.46 MB
english, 2007
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