The Grand Pareto: A Methodology for Identifying and Quantifying Yield Detractors in Volume Semiconductor Manufacturing
Desineni, Rao, Berndlmaier, Zachary, Winslow, Jonathan, Blauberg, Alisa, Chu, Benjamin R.Volume:
20
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2007.896641
Date:
May, 2007
File:
PDF, 1.46 MB
english, 2007