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[IRE 1978 International Electron Devices Meeting - ()] 1978 International Electron Devices Meeting - "The use, characterization, and reliability implications of vacuum deposited silicon nitride as a capacitor dielectric in integrated circuits"
Roop, R.M., Saltich, J.L.Year:
1978
Language:
english
DOI:
10.1109/iedm.1978.189453
File:
PDF, 206 KB
english, 1978