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[IEEE Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 - Taiwan (5-8 July 2004)] Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 (IEEE Cat. No.04TH8743) - Dielectric-breakdown-induced epitaxy: a universal breakdown defect in ultrathin gate dielectrics
Ranjan, R., Pey, K.L., Selvarajoo, T.A.L., Tang, L.J., Tung, C.H., Lin, W.H.Year:
2004
Language:
english
DOI:
10.1109/ipfa.2004.1345538
File:
PDF, 297 KB
english, 2004