[IEEE 2014 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - San Hose, CA, USA (2014.5.20-2014.5.23)] IEEE International Interconnect Technology Conference - Restoration and pore sealing of low-k films by UV-assisted processes
Xie, Bo, Chan, Kelvin, Cui, David, Ren, He, Raj, Daemian, Hollar, Eric, Baluja, Sanjeev, Rocha, Juan, Naik, Mehul, Demos, AlexYear:
2014
Language:
english
DOI:
10.1109/iitc.2014.6831901
File:
PDF, 403 KB
english, 2014