Patterning block copolymer thin films by deep X-ray...

Patterning block copolymer thin films by deep X-ray lithography

Innocenzi, Plinio, Kidchob, Tongjit, Costacurta, Stefano, Falcaro, Paolo, Marmiroli, Benedetta, Cacho-Nerin, Fernando, Amenitsch, Heinz
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Volume:
6
Year:
2010
Language:
english
Journal:
Soft Matter
DOI:
10.1039/b925105g
File:
PDF, 472 KB
english, 2010
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