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[IEEE 2004 43rd IEEE Conference on Decision and Control (CDC) (IEEE Cat. No.04CH37601) - Nassau, Bahamas (2004.12.17-2004.12.17)] 2004 43rd IEEE Conference on Decision and Control (CDC) (IEEE Cat. No.04CH37601) - Synthesis of an event based deadlock avoidance supervisor for semiconductor manufacturing systems with choices in process flows

Wenle Zhang,, Ziqiang John Mao,
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Year:
2004
DOI:
10.1109/cdc.2004.1429535
File:
PDF, 167 KB
2004
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