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[IEEE 2011 IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kaohsiung, Taiwan (2011.02.20-2011.02.23)] 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Confined etchant layer technique (CELT) for micromanufacture
Zhan, Dongping, Han, Lianhuan, Yang, Dezhi, Jiang, Li-min, Tang, Jing, Sun, Jian-jun, Shi, Kang, Zhou, Jianzhang, Tian, Zhong-Qun, Tian, Zhao-WuYear:
2011
Language:
english
DOI:
10.1109/nems.2011.6017490
File:
PDF, 582 KB
english, 2011