Frequency-dependent electrostatic actuation in microfluidic...

Journal of Microelectromechanical Systems 2005 / 02 Vol. 14; Iss. 1

Frequency-dependent electrostatic actuation in microfluidic MEMS

Sounart, T.L., Michalske, T.A., Zavadil, K.R.
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Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2004.839006
Date:
February, 2005
File:
PDF, 924 KB
english, 2005
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