Impact Behavior and Energy Transfer Efficiency of...

Journal of Microelectromechanical Systems 2006 / 02 Vol. 15; Iss. 1

Impact Behavior and Energy Transfer Efficiency of Pulse-Driven Bent-Beam Electrothermal Actuators

Shimamura, Y., Udeshi, K., Que, L., Park, J., Gianchandani, Y.B.
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Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.863696
Date:
February, 2006
File:
PDF, 1.06 MB
english, 2006
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