Polarization Scanning Ellipsometry Method for Measuring...

Journal of Lightwave Technology 2013 / 7 Vol. 31; Iss. 14

Polarization Scanning Ellipsometry Method for Measuring Effective Ellipsometric Parameters of Isotropic and Anisotropic Thin Films

Yu-Lung Lo,, Yi-Fan Chung,, Huan-Hsu Lin,
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Volume:
31
Language:
english
Journal:
Journal of Lightwave Technology
DOI:
10.1109/jlt.2013.2265716
Date:
July, 2013
File:
PDF, 2.09 MB
english, 2013
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