![](/img/cover-not-exists.png)
[IEEE 2010 Proceedings 60th Electronic Components and Technology Conference (ECTC) - Las Vegas, NV, USA (2010.06.1-2010.06.4)] 2010 Proceedings 60th Electronic Components and Technology Conference (ECTC) - Carrierless design for handling and processing of ultrathin wafers
Bieck, Florian, Spiller, Sven, Molina, Froilan, Topper, Michael, Lopper, Christina, Kuna, Ingrid, Seng, Tan Chuan, Tabuchi, TomotakaYear:
2010
Language:
english
DOI:
10.1109/ectc.2010.5490953
File:
PDF, 1.53 MB
english, 2010