Pb(Zr,Ti)O 3 -silicon...

Integrated Ferroelectrics 1998 / 04 Vol. 19; Iss. 1-4

Pb(Zr,Ti)O 3 -silicon heterostructures fabricated by direct wafer bonding

Alexe, Marin, Scott, James F., Pignolet, Alain, Hesse, Dietrich, Gösele, Ulrich
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Volume:
19
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589808012697
Date:
April, 1998
File:
PDF, 996 KB
english, 1998
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