Effect of Process Deviations on Performance of Piezoresistive Pressure Sensors
Singh, Jaspreet, Rajanna, K., Reddy, A. Mallikarjuna, Singh, KamaljeetVolume:
27
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2014.2329569
Date:
August, 2014
File:
PDF, 1.84 MB
english, 2014