[IEEE 2009 IEEE International Electron Devices Meeting (IEDM) - Baltimore, MD, USA (2009.12.7-2009.12.9)] 2009 IEEE International Electron Devices Meeting (IEDM) - Atomistic process modeling based on Kinetic Monte Carlo and Molecular Dynamics for optimization of advanced devices
Pelaz, L., Marques, L., Aboy, M., Lopez, P., Santos, I., Duffy, R.Year:
2009
Language:
english
DOI:
10.1109/iedm.2009.5424309
File:
PDF, 3.61 MB
english, 2009