Characterization of a silicon thermal gas-flow sensor with...

IEEE Sensors Journal 2002 / 10 Vol. 2; Iss. 5

Characterization of a silicon thermal gas-flow sensor with porous silicon thermal isolation

Kaltsas, G., Nassiopoulos, A.A., Nassiopoulou, A.G.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
2
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2002.806209
Date:
October, 2002
File:
PDF, 1.16 MB
english, 2002
Conversion to is in progress
Conversion to is failed