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Bidirectional electrostatic actuator operated with charge control
Sugimoto, T., Nonaka, K., Horenstein, M.N.Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.845410
Date:
August, 2005
File:
PDF, 440 KB
english, 2005