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[IEEE 2005 IEEE Asian Solid-State Circuits Conference - Hsinchu, Taiwan (2005.11.1-2005.11.1)] 2005 IEEE Asian Solid-State Circuits Conference - Novel Test Structure to emulate Capacitance Variations of a Rate-Grade MEMS Gyroscope
Sangati, Rajesh, Syamala, Sowjanya, Bhat, NavakantaYear:
2006
Language:
english
DOI:
10.1109/asscc.2005.251753
File:
PDF, 233 KB
english, 2006