![](/img/cover-not-exists.png)
[IEEE 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Boston, MA, USA (4-6 May 2004)] 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530) - A novel system for fully automated creation of layout, documentation and test programs for electrical test structures
Leonardelli, G., Roehrer, G., Minixhofer, R., Knaipp, M.Year:
2004
Language:
english
DOI:
10.1109/asmc.2004.1309566
File:
PDF, 158 KB
english, 2004