[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Structural characterization of Mo/Ru/Si EUV reflector by optical modeling
In-Yong Kang,, Tae Geun Kim,, Seung Yoon Lee,, Jinho Ahn,, Yong-Chae Chung,Year:
2003
Language:
english
DOI:
10.1109/imnc.2003.1268534
File:
PDF, 142 KB
english, 2003