Dual PE-CVD Circulating Fluidized Bed Reactor

Dual PE-CVD Circulating Fluidized Bed Reactor

Tap, R., Willert-Porada, M.
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Volume:
32
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2004.835969
Date:
October, 2004
File:
PDF, 1.29 MB
english, 2004
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