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[IEEE IWSM. 1998 3rd International Workshop on Statistical Metrology - Honolulu, HI, USA (7 June 1998)] IWSM. 1998 3rd International Workshop on Statistical Metrology (Cat. No.98EX113) - On the impact of dishing in metal CMP processes on circuit performance
Stine, B.E., Vallishayee, R.Year:
1998
Language:
english
DOI:
10.1109/iwstm.1998.729772
File:
PDF, 345 KB
english, 1998