[IEEE International Reliability Physics Symposium - Dallas, TX, USA (30 March-4 April 2003)] 2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual. - Stress polarity dependence of degradation and breakdown of SiO/sub 2//high-k stacks
Degrave, R., Kauerauf, T., Kerber, A., Cartier, E., Govoreanu, B., Roussel, P., Pantisano, L., Blomme, P., Kaczer, B., Groeseneken, G.Year:
2003
Language:
english
DOI:
10.1109/relphy.2003.1197715
File:
PDF, 417 KB
english, 2003