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Application of Nanoimprint Technology in MEMS-Based Micro Direct-Methanol Fuel Cell ( $\mu$-DMFC)
Yi Zhang,, Jian Lu,, Haoshen Zhou,, Itoh, T., Maeda, R.Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2008.926979
Date:
August, 2008
File:
PDF, 1.24 MB
english, 2008