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[IEEE 2011 IEEE 4th International Nanoelectronics Conference (INEC) - Tao-Yuan, Taiwan (2011.06.21-2011.06.24)] The 4th IEEE International NanoElectronics Conference - Fabrication of double nanohoneycombs (Al/SiO2) with controllable size using nanosphere lithography
Lee, Chao-Te, Wu, Tzung-Chen, Cho, Wen-Hao, Kei, Chi-Chung, Hsiao, Chien-Nan, Ou, Sin-LiangYear:
2011
Language:
english
DOI:
10.1109/inec.2011.5991799
File:
PDF, 451 KB
english, 2011