Control of Nitrogen Atomic Density and Enthalpy Flow Into Reaction Chamber in $\hbox{Ar/N}_{2}$ Pulse-Modulated Induction Thermal Plasmas
Tanaka, Yasunori, Muroya, Takafumi, Hayashi, Kouhei, Uesugi, YoshihikoVolume:
35
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2007.892709
Date:
April, 2007
File:
PDF, 516 KB
english, 2007