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[IEEE 2007 International Symposium on Micro-NanoMechatronics and Human Science - Nagoya, Japan (2007.11.11-2007.11.14)] 2007 International Symposium on Micro-NanoMechatronics and Human Science - Fabrication of X-ray Mask using Poly-Si Microstructure for Diffraction Grating
Shimada, Kazuma, Tsujii, Hiroshi, Noda, Daiji, Hattori, TadashiYear:
2007
Language:
english
DOI:
10.1109/mhs.2007.4420897
File:
PDF, 4.95 MB
english, 2007