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Reaction control of tetraethyl orthosilicate (TEOS)/O3 and tetramethyl orthosilicate (TMOS)/O3 counter diffusion chemical vapour deposition for preparation of molecular-sieve membranes
Yamaguchi, Takeo, Ying, Xin, Tokimasa, Yasuhiko, Nair, Balagopal N., Sugawara, Takashi, Nakao, Q—Shin-ichiVolume:
2
Year:
2000
Language:
english
Journal:
Physical Chemistry Chemical Physics
DOI:
10.1039/b004642f
File:
PDF, 185 KB
english, 2000