[IEEE 1989 International Conference on Microelectronic Test Structures - Edinburgh, UK (13-14 March 1989)] Proceedings of the 1989 International Conference on Microelectronic Test Structures - Analysis of the determination of the dimensional offset of conducting layers and MOS transistors
Swaving, S., van der Klauw, K.L.M., Joosten, J.J.M.Year:
1989
Language:
english
DOI:
10.1109/icmts.1989.39274
File:
PDF, 542 KB
english, 1989