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[IEEE Nanophotonics - Sapporo, Japan (2010.08.9-2010.08.12)] 2010 International Conference on Optical MEMS and Nanophotonics - Vertical comb-drive MEMS mirror with sensing function for phase-shift device
Oda, Kentaro, Terao, Kyohei, Suzuki, Takaaki, Takao, Hidekuni, Ishimaru, Ichiro, Oohira, FumikazuYear:
2010
Language:
english
DOI:
10.1109/omems.2010.5672213
File:
PDF, 1.64 MB
english, 2010