High-Performance High-$K$/Metal Planar Self-Aligned...

IEEE Transactions on Nanotechnology 2008 / 09 Vol. 7; Iss. 5

High-Performance High-$K$/Metal Planar Self-Aligned Gate-All-Around CMOS Devices

Pouydebasque, A., Denorme, S., Loubet, N., Wacquez, R., Bustos, J., Leverd, F., Deloffre, E., Barnola, S., Dutartre, D., Coronel, P., Skotnicki, T.
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Volume:
7
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2008.2002981
Date:
September, 2008
File:
PDF, 1012 KB
english, 2008
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