Diffuse reflectance Fourier-transform infrared study of the plasma-fluorination of diamond surfaces using a microwave discharge in CF4
Ando, Toshihiro, Tanaka, Junzo, Ishii, Motohiko, Kamo, Mutsukazu, Sato, Yoichiro, Ohashi, Naoki, Shimosaki, ShinjiVolume:
89
Year:
1993
Language:
english
Journal:
Journal of the Chemical Society, Faraday Transactions
DOI:
10.1039/ft9938903105
File:
PDF, 594 KB
english, 1993