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[IEEE Twenty First IEEE/CPMT International Electronics Manufacturing Technology Symposium 1997 IEMT Symposium - Austin, TX, USA (13-15 Oct. 1997)] Twenty First IEEE/CPMT International Electronics Manufacturing Technology Symposium Proceedings 1997 IEMT Symposium - Statistical machine control: a practical approach to total productive maintenance of semiconductor equipment
Lavallart, F., Cooper, N.Year:
1997
Language:
english
DOI:
10.1109/iemt.1997.626881
File:
PDF, 702 KB
english, 1997