Planarized and Nanopatterned Mesoporous Silica Thin Films...

IEEE Transactions on Nanotechnology 2011 / 05 Vol. 10; Iss. 3

Planarized and Nanopatterned Mesoporous Silica Thin Films by Chemical-Mechanical Polishing of Gap-Filled Topographically Patterned Substrates

Arnold, D C, Blake, A, Quinn, J, Iacopino, D, Tobin, J M, O'Mahony, Colm, Holmes, J D, Morris, M A
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
10
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2010.2046909
Date:
May, 2011
File:
PDF, 1.42 MB
english, 2011
Conversion to is in progress
Conversion to is failed