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Test structures for MCM-D technology characterization
Lozano, M., Santander, J., Cabruja, E., Perello, C., Ullan, M., Lora-Tamayo, E., Doyle, R., McCarthy, G., Barton, J.Volume:
12
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/66.762876
Date:
May, 1999
File:
PDF, 1.16 MB
english, 1999