Strain Build-Up, Swelling and Stacking Fault Formation in...

Materials Science Forum 2012 / 5 Vol. 717-720

Strain Build-Up, Swelling and Stacking Fault Formation in Implanted 4H-SiC

Barbot, Jean François, Leclerc, S., Tromas, Christophe, Audurier, Valerie, Declémy, Alain, Texier, Michael, Beaufort, Marie France
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Volume:
717-720
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.717-720.485
Date:
May, 2012
File:
PDF, 662 KB
english, 2012
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