Enhancing CoCr(Pt)Ta target's pass-through flux for magnetron sputtering
Schlott, M., Weigert, M., Gehman, B.L.Volume:
31
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.490162
Date:
January, 1995
File:
PDF, 631 KB
english, 1995