A low valent metalorganic precursor for the growth of...

A low valent metalorganic precursor for the growth of tungsten nitride thin films by atomic layer deposition

Dezelah, Charles L., El-Kadri, Oussama M., Kukli, Kaupo, Arstila, Kai, Baird, Ronald J., Lu, Jun, Niinist?, Lauri, Winter, Charles H.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
17
Year:
2007
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/b610873c
File:
PDF, 450 KB
english, 2007
Conversion to is in progress
Conversion to is failed